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ZnO thin film based flexible temperature sensor

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    ZnO thin film based flexible SAW devices were fabricated on commercial aluminum foils. The frequency responses were characterized and zero order Lamb wave modes were used to perform flexible temperature sensing. The devices exhibited a large value of temperature coefficient of frequency, good temperature sensitivity, and repeatability. They are promising to be used for flexible and wearable temperature sensing applications.

    Original languageEnglish
    Title of host publication2017 IEEE SENSORS 2017
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Number of pages3
    ISBN (Electronic)9781509010127
    ISBN (Print)9781509010134
    DOIs
    Publication statusPublished - 25 Dec 2017
    Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
    Duration: 30 Oct 20171 Nov 2017

    Publication series

    NameProceedings of IEEE Sensors
    Volume2017-December
    ISSN (Print)1930-0395
    ISSN (Electronic)2168-9229

    Conference

    Conference16th IEEE SENSORS Conference, ICSENS 2017
    Country/TerritoryUnited Kingdom
    CityGlasgow
    Period30/10/171/11/17

    Keywords

    • flexible SAW device
    • TCF
    • thin film
    • ZnO

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