ZnO thin film based flexible temperature sensor

Sameer A. Hasan, Des Gibson, Shigeng Song, Qiang Wu, Wai Pang Ng, Glen McHale, John Dean, Y. Q. Fu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Citations (Scopus)

Abstract

ZnO thin film based flexible SAW devices were fabricated on commercial aluminum foils. The frequency responses were characterized and zero order Lamb wave modes were used to perform flexible temperature sensing. The devices exhibited a large value of temperature coefficient of frequency, good temperature sensitivity, and repeatability. They are promising to be used for flexible and wearable temperature sensing applications.

Original languageEnglish
Title of host publication2017 IEEE SENSORS 2017
Place of PublicationPiscataway, NJ
PublisherIEEE
Number of pages3
ISBN (Electronic)9781509010127
ISBN (Print)9781509010134
DOIs
Publication statusPublished - 25 Dec 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Publication series

NameProceedings of IEEE Sensors
Volume2017-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom
CityGlasgow
Period30/10/171/11/17

Keywords

  • flexible SAW device
  • TCF
  • thin film
  • ZnO

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