Abstract
A method for producing a plurality of piezoelectric ultrasound transducer elements, the method comprising providing or depositing a piezoelectric material on at least part of a surface of a sheet of substrate to form a layered member; and forming the one or more piezoelectric ultrasound transducer elements from the layered member.
Original language | English |
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Patent number | GB1619108.2 |
IPC | B06B 1/06,H01L 41/31,H01L 41/314 |
Priority date | 11/11/16 |
Filing date | 10/11/17 |
Publication status | Published - 17 May 2018 |