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The effect of PECVD plasma decomposition on the wettability and dielectric constant changes in silicon modified DLC films for potential MEMS and low stiction applications

  • A. A. Ogwu
  • , T. I. T. Okpalugo
  • , J. A. D. McLaughlin

    Research output: Contribution to journal › Article › peer-review

    11   Link opens in a new tab Citations (Scopus)

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