Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song; Sijia Cai; Daxing Han; Carlos García Nuñez; Gong Zhan; Gavin Wallace; Lewis Fleming; Kieran Craig; Stuart Reid; Iain Martin; Sheila Rowan; Des Gibson

doi:10.1364/OIC.2022.WB.2

Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhan, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain Martin, Sheila Rowan, Des Gibson^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Abstract

This work presents the characterisation of optical and mechanical properties of thin films based on (Ta₂O₅)_1-x(SiO₂)_x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.

Original language	English
Title of host publication	Optical Interference Coatings Conference (OIC) 2022
Editors	R. Sargent, A. Sytchkova
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/OIC.2022.WB.2
Publication status	Published - 2022
Event	Optical Interference Coatings, OIC 2022 - Vancouver, Canada Duration: 19 Jun 2022 → 24 Jun 2022

Publication series

Name	Technical Digest Papers
Publisher	Optica Publishing Group

Conference

Conference	Optical Interference Coatings, OIC 2022
Country/Territory	Canada
City	Vancouver
Period	19/06/22 → 24/06/22

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10.1364/OIC.2022.WB.2

2022 03 18 Song et al Tantalum acceptedAccepted author manuscript, 366 KB

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Song, S., Cai, S., Han, D., Nuñez, C. G., Zhan, G., Wallace, G., Fleming, L., Craig, K., Reid, S., Martin, I., Rowan, S., & Gibson, D. (2022). Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors. In R. Sargent, & A. Sytchkova (Eds.), Optical Interference Coatings Conference (OIC) 2022 Article WB.2 (Technical Digest Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/OIC.2022.WB.2

Song, Shigeng ; Cai, Sijia ; Han, Daxing et al. / Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors. Optical Interference Coatings Conference (OIC) 2022. editor / R. Sargent ; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. (Technical Digest Papers).

@inproceedings{1fa2868e0a424ae6a076c546a2a183b1,

title = "Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors",

abstract = "This work presents the characterisation of optical and mechanical properties of thin films based on (Ta2O5)1-x(SiO2)x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.",

author = "Shigeng Song and Sijia Cai and Daxing Han and Nu{\~n}ez, {Carlos Garc{\'i}a} and Gong Zhan and Gavin Wallace and Lewis Fleming and Kieran Craig and Stuart Reid and Iain Martin and Sheila Rowan and Des Gibson",

note = "Funding Information: Acknowledgments: Authors would like to thank the University of the West of Scotland, University of Strathclyde, University of Glasgow, and Science and Technology Facilities Council (STFC) for financial support (ST/V005626/1). Authors also thank their colleagues within LIGO Scientific Collaboration for advice & support. Publisher Copyright: {\textcopyright} 2022 TheAuthor(s); Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

year = "2022",

doi = "10.1364/OIC.2022.WB.2",

language = "English",

series = "Technical Digest Papers",

publisher = "Optica Publishing Group (formerly OSA)",

editor = "R. Sargent and A. Sytchkova",

booktitle = "Optical Interference Coatings Conference (OIC) 2022",

}

Song, S, Cai, S, Han, D, Nuñez, CG, Zhan, G, Wallace, G, Fleming, L, Craig, K, Reid, S, Martin, I, Rowan, S & Gibson, D 2022, Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors. in R Sargent & A Sytchkova (eds), Optical Interference Coatings Conference (OIC) 2022., WB.2, Technical Digest Papers, Optica Publishing Group (formerly OSA), Optical Interference Coatings, OIC 2022, Vancouver, Canada, 19/06/22. https://doi.org/10.1364/OIC.2022.WB.2

Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors. / Song, Shigeng; Cai, Sijia; Han, Daxing et al.
Optical Interference Coatings Conference (OIC) 2022. ed. / R. Sargent; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. WB.2 (Technical Digest Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

AU - Song, Shigeng

AU - Cai, Sijia

AU - Han, Daxing

AU - Nuñez, Carlos García

AU - Zhan, Gong

AU - Wallace, Gavin

AU - Fleming, Lewis

AU - Craig, Kieran

AU - Reid, Stuart

AU - Martin, Iain

AU - Rowan, Sheila

AU - Gibson, Des

N1 - Funding Information: Acknowledgments: Authors would like to thank the University of the West of Scotland, University of Strathclyde, University of Glasgow, and Science and Technology Facilities Council (STFC) for financial support (ST/V005626/1). Authors also thank their colleagues within LIGO Scientific Collaboration for advice & support. Publisher Copyright: © 2022 TheAuthor(s)

PY - 2022

Y1 - 2022

N2 - This work presents the characterisation of optical and mechanical properties of thin films based on (Ta2O5)1-x(SiO2)x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.

AB - This work presents the characterisation of optical and mechanical properties of thin films based on (Ta2O5)1-x(SiO2)x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.

UR - http://www.scopus.com/inward/record.url?scp=85139140193&partnerID=8YFLogxK

U2 - 10.1364/OIC.2022.WB.2

DO - 10.1364/OIC.2022.WB.2

M3 - Conference contribution

AN - SCOPUS:85139140193

T3 - Technical Digest Papers

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group (formerly OSA)

T2 - Optical Interference Coatings, OIC 2022

Y2 - 19 June 2022 through 24 June 2022

ER -

Song S, Cai S, Han D, Nuñez CG, Zhan G, Wallace G et al. Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors. In Sargent R, Sytchkova A, editors, Optical Interference Coatings Conference (OIC) 2022. Optica Publishing Group (formerly OSA). 2022. WB.2. (Technical Digest Papers). doi: 10.1364/OIC.2022.WB.2

Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

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