Tantalum oxide and silica mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhan, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain Martin, Sheila Rowan, Des Gibson*

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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    Abstract

    This work presents the characterisation of optical and mechanical properties of thin films based on (Ta2O5)1-x(SiO2)x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.

    Original languageEnglish
    Title of host publicationOptical Interference Coatings Conference (OIC) 2022
    EditorsR. Sargent, A. Sytchkova
    PublisherOptica Publishing Group (formerly OSA)
    ISBN (Electronic)9781557528209
    DOIs
    Publication statusPublished - 2022
    EventOptical Interference Coatings, OIC 2022 - Vancouver, Canada
    Duration: 19 Jun 202224 Jun 2022

    Publication series

    NameTechnical Digest Papers
    PublisherOptica Publishing Group

    Conference

    ConferenceOptical Interference Coatings, OIC 2022
    Country/TerritoryCanada
    CityVancouver
    Period19/06/2224/06/22

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