Keyphrases
Low Voltage
100%
Sputtered Films
100%
Zinc Nitride
100%
Submicron
100%
Lithography
100%
Electrical Discharge
100%
Nitrides
50%
Arc Discharge
50%
Resistivity
50%
Glass Substrate
25%
Scanning Electron Microscopy
25%
Compositional Analysis
25%
Nitrided Layer
25%
Grain Size
25%
Structural Properties
25%
Characteristic Behavior
25%
Work Analysis
25%
Radio Frequency Magnetron Sputtering
25%
Thin Oxides
25%
Pure Zn
25%
Ion Beam Analysis Techniques
25%
Working Gas
25%
Effective Mechanism
25%
Electrical Breakdown
25%
High Voltage Electrical Discharges
25%
Resistivity Measurement
25%
Micrometric
25%
Four Probe Resistivity
25%
ZnO Crystal
25%
Zinc Forms
25%
Metal Tip
25%
Self-assembled Microstructures
25%
Film Properties
25%
Low Bias Voltage
25%
Material Science
ZnO
100%
Lithography
100%
Sputtered Film
100%
Nitride Compound
100%
Electrical Resistivity
75%
Film
25%
Scanning Electron Microscopy
25%
Oxide Compound
25%
Morphology
25%
Magnetron Sputtering
25%
Grain Size
25%
Structural Property
25%
Pure Zinc
25%
Electrical Breakdown
25%
Zinc
25%
Surface (Surface Science)
25%
Engineering
Nitride
100%
Lithography
100%
Electrical Discharge
100%
Radio Frequency
33%
Nitride Layer
33%
Magnetron
33%
Structural Property
33%
Bias Voltage
33%
Polycrystalline
33%
Oxide Layer
33%
Film Property
33%
Glass Substrate
33%