Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

X.S. Zhou, C. Zhao, R. Hou, J. Zhang, K.J. Kirk, D. Hutson, Y.J. Guo, P.A. Hu, S.M. Peng, X.T. Zu, Y.Q. Fu

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.
Original languageEnglish
Pages (from-to)1991-1998
Number of pages8
JournalUltrasonics
Volume54
Issue number7
DOIs
Publication statusPublished - Sep 2014
Externally publishedYes

Keywords

  • ZnO film
  • Annealing
  • Flexible ultrasonic transducer
  • Pulse-echo
  • Ultrasonic wave

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