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Spatial resolution assessment of Nano-SQUIDs made by focused ion beam

  • L. Hao
  • , J. C. Macfarlane
  • , J. C. Gallop
  • , E. Romans
  • , D. Cox
  • , D. Hutson
  • , J. Chen

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The ability to reduce SQUID dimensions into the sub-micrometer or nanometer regime points the way towards novel applications, particularly in emerging fields such as quantum information processing, single-photon/particle detection, and experimental studies of nano-scale entities such as Bose-Einstein condensates. We report here on our ongoing work combining traditional thin-film and photolithographic fabrication processes with computer-aided-design software and focused ion beam milling to realize sub-micrometer superconducting structures. Their magnetic field sensitivity, noise behavior, spatial resolution, and prospects for magnetic spin detection are discussed.
    Original languageEnglish
    Pages (from-to)742-745
    Number of pages4
    JournalIEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    Volume17
    Issue number2
    DOIs
    Publication statusPublished - Jun 2007

    Keywords

    • magnetic field sensitivity
    • nanoscale SQUID
    • spatial resolution
    • superconductor

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