Spatial resolution assessment of Nano-SQUIDs made by focused ion beam

L. Hao; J. C. Macfarlane; J. C. Gallop; E. Romans; D. Cox; D. Hutson; J. Chen

doi:10.1109/TASC.2007.898068

Spatial resolution assessment of Nano-SQUIDs made by focused ion beam

L. Hao, J. C. Macfarlane, J. C. Gallop, E. Romans, D. Cox, D. Hutson, J. Chen

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

The ability to reduce SQUID dimensions into the sub-micrometer or nanometer regime points the way towards novel applications, particularly in emerging fields such as quantum information processing, single-photon/particle detection, and experimental studies of nano-scale entities such as Bose-Einstein condensates. We report here on our ongoing work combining traditional thin-film and photolithographic fabrication processes with computer-aided-design software and focused ion beam milling to realize sub-micrometer superconducting structures. Their magnetic field sensitivity, noise behavior, spatial resolution, and prospects for magnetic spin detection are discussed.

Original language	English
Pages (from-to)	742-745
Number of pages	4
Journal	IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
Volume	17
Issue number	2
DOIs	https://doi.org/10.1109/TASC.2007.898068
Publication status	Published - Jun 2007

Keywords

magnetic field sensitivity
nanoscale SQUID
spatial resolution
superconductor

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10.1109/TASC.2007.898068

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abstract = "The ability to reduce SQUID dimensions into the sub-micrometer or nanometer regime points the way towards novel applications, particularly in emerging fields such as quantum information processing, single-photon/particle detection, and experimental studies of nano-scale entities such as Bose-Einstein condensates. We report here on our ongoing work combining traditional thin-film and photolithographic fabrication processes with computer-aided-design software and focused ion beam milling to realize sub-micrometer superconducting structures. Their magnetic field sensitivity, noise behavior, spatial resolution, and prospects for magnetic spin detection are discussed.",

keywords = "magnetic field sensitivity, nanoscale SQUID, spatial resolution, superconductor",

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AU - Hao, L.

AU - Macfarlane, J. C.

AU - Gallop, J. C.

AU - Romans, E.

AU - Cox, D.

AU - Hutson, D.

AU - Chen, J.

PY - 2007/6

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AB - The ability to reduce SQUID dimensions into the sub-micrometer or nanometer regime points the way towards novel applications, particularly in emerging fields such as quantum information processing, single-photon/particle detection, and experimental studies of nano-scale entities such as Bose-Einstein condensates. We report here on our ongoing work combining traditional thin-film and photolithographic fabrication processes with computer-aided-design software and focused ion beam milling to realize sub-micrometer superconducting structures. Their magnetic field sensitivity, noise behavior, spatial resolution, and prospects for magnetic spin detection are discussed.

KW - magnetic field sensitivity

KW - nanoscale SQUID

KW - spatial resolution

KW - superconductor

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Spatial resolution assessment of Nano-SQUIDs made by focused ion beam

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Keywords

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