Small Batch High Throughput Plasma Activated Magnetron Sputtering System

Desmond Gibson, Jerry Martin, Francis Placido, David Childs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Magnetron sputtering offers a flexible and high throughput deposition process for optical coatings. Sputtering uses two or more metal targets, depositing multilayers comprising dielectrics, metals and conductive oxides.
Original languageEnglish
Title of host publicationOptical Interference Coatings
EditorsM. Tilsch , D. Ristau
PublisherThe Optical Society
ISBN (Print)978-1-55752-970-1
DOIs
Publication statusPublished - Jun 2013
EventOptical Interference Coatings 2013 - Whistler, Canada
Duration: 16 Jun 201321 Jun 2013

Conference

ConferenceOptical Interference Coatings 2013
CountryCanada
CityWhistler
Period16/06/1321/06/13

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Gibson, D., Martin, J., Placido, F., & Childs, D. (2013). Small Batch High Throughput Plasma Activated Magnetron Sputtering System. In M. Tilsch , & D. Ristau (Eds.), Optical Interference Coatings [ThB.8] The Optical Society. https://doi.org/10.1364/OIC.2013.ThB.8