Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

Krystian L. Wlodarczyk; Emma Bryce; Noah Schwartz; Mel Strachan; David Hutson; Robert R. J. Maier; David Atkinson; Steven Beard; Tom Baillie; Phil Parr-Burman; Katherine Kirk; Duncan P. Hand

doi:10.1063/1.4865125

Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

Krystian L. Wlodarczyk
, Emma Bryce
, Noah Schwartz
, Mel Strachan
, David Hutson
, Robert R. J. Maier
, David Atkinson
, Steven Beard
, Tom Baillie
, Phil Parr-Burman
, Katherine Kirk
, Duncan P. Hand

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.

Original language	English
Article number	024502
Number of pages	10
Journal	Review of Scientific Instruments
Volume	85
Issue number	2
DOIs	https://doi.org/10.1063/1.4865125
Publication status	Published - 12 Feb 2014

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10.1063/1.4865125Licence: CC BY

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title = "Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications",

abstract = "A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented. ",

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doi = "10.1063/1.4865125",

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AU - Wlodarczyk, Krystian L.

AU - Bryce, Emma

AU - Schwartz, Noah

AU - Strachan, Mel

AU - Hutson, David

AU - Maier, Robert R. J.

AU - Atkinson, David

AU - Beard, Steven

AU - Baillie, Tom

AU - Parr-Burman, Phil

AU - Kirk, Katherine

AU - Hand, Duncan P.

PY - 2014/2/12

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N2 - A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.

AB - A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.

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VL - 85

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

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ER -

Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

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