Keyphrases
Resonant Mode
100%
One-group
100%
Glass Substrate
100%
Finite Element Model
100%
Thin Magnetic Films
100%
Silicon Substrate
100%
Rayleigh Wave Velocity
100%
Material Parameters
100%
Acoustic Mode
100%
Electrical Measurements
100%
Patterned Electrode
100%
Activated Surface
100%
Waveguide System
100%
Acoustic Resonance
100%
Surface Acoustic Wave Devices
100%
Film Electrode
100%
Center-to-center Distance
100%
Acoustic Waveguide
100%
Optical Measurement
100%
Surface Waves
100%
Anisotropic Mechanical Properties
100%
Engineering
Experimental Result
100%
Material Parameter
100%
Finite Element Modeling
100%
Length Scale
100%
Anisotropic
100%
Acoustic Mode
100%
Waveguide
100%
Resonance Mode
100%
Surface Acoustic Wave Device
100%
Silicon Substrate
100%
Acoustic Resonance
100%
Rayleigh Velocity
100%
Glass Substrate
100%
Mechanical Property
100%
Electrical Measurement
100%
Physics
Surface Acoustic Wave Device
100%
Acoustic Wave
100%
Finite Element Modeling
100%
Magnetic Thin Films
100%
Acoustic Resonance
100%
Surface Wave
100%
Material Science
Silicon
100%
Waveguide
100%
Surface (Surface Science)
100%
Finite Element Modeling
50%
Magnetic Thin Films
50%
Surface Acoustic Wave Device
50%
Mechanical Property
50%