Reactive ion etching of Nb thin films for Nb/AlAlOx/Nb Josephson tunnel junctions

Engineering & Materials Science

• Tunnel junctions 100%
• Reactive ion etching 96%
• Thin films 67%
• Scanning electron microscopy 56%
• Magnetron sputtering 47%
• Photoresists 45%
• Niobium 44%
• Silicon wafers 42%
• Gas mixtures 40%
• Anisotropy 36%
• Regression analysis 36%
• Masks 33%
• Design of experiments 33%
• Polynomials 27%
• Fabrication 26%
• Chemical analysis 23%
• Gases 20%

Physics & Astronomy

• tunnel junctions 73%
• etching 53%
• thin films 36%
• ions 33%
• scanning electron microscopy 30%
• gas composition 28%
• photoresists 24%
• regression analysis 24%
• niobium 24%
• gas mixtures 22%
• polynomials 21%
• masks 20%
• magnetron sputtering 19%
• methodology 19%
• wafers 17%
• anisotropy 15%
• fabrication 14%
• profiles 12%
• silicon 12%

Chemical Compounds

• Etching 64%
• Scanning Electron Microscopy 42%
• Pressure 41%
• Magnetron Sputtering 41%
• Gas 37%
• Anisotropy 33%
• Ion 28%
• Flow 22%
• Surface 22%
• Mixture 15%