Reactive dynamics analysis of critical NB2O5 sputtering rate for drum based metal-like deposition

Shigeng Song*, Cheng Li, Des Gibson

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Drum based metal-like film deposition for oxide was investigated using single wavelength in-situ monitoring and dynamic reaction analysis to determine critical metal deposition rate found 0.187nm Nb oxidized sufficiently in one revolution of drum.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2016
PublisherOptical Society of America
ISBN (Print)9781943580132
DOIs
Publication statusPublished - 19 Jun 2016
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: 19 Jun 201624 Jun 2016

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceOptical Interference Coatings, OIC 2016
Country/TerritoryUnited States
CityTucson
Period19/06/1624/06/16

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