@inproceedings{2aeebf8161304c11a9f8c35d38f0e442,
title = "Reactive dynamics analysis of critical NB2O5 sputtering rate for drum based metal-like deposition",
abstract = "Drum based metal-like film deposition for oxide was investigated using single wavelength in-situ monitoring and dynamic reaction analysis to determine critical metal deposition rate found 0.187nm Nb oxidized sufficiently in one revolution of drum.",
author = "Shigeng Song and Cheng Li and Des Gibson",
year = "2016",
month = jun,
day = "19",
doi = "10.1364/OIC.2016.WB.8",
language = "English",
isbn = "9781943580132",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Optical Interference Coatings, OIC 2016",
address = "United States",
note = "Optical Interference Coatings, OIC 2016 ; Conference date: 19-06-2016 Through 24-06-2016",
}