Reactive dynamics analysis of critical Nb2O5 sputtering rate for drum-based metal-like deposition

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Abstract

Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5 deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb2O5 samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.
Original languageEnglish
Pages (from-to)C206-C210
JournalApplied Optics
Volume56
Issue number4
DOIs
Publication statusPublished - 1 Feb 2017

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Keywords

  • Deposition and fabrication
  • Materials and process characterization
  • Thin films, optical properties

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