Reactive dynamics analysis of critical Nb2O5 sputtering rate for drum-based metal-like deposition

Research output: Contribution to journalArticle

Abstract

Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5 deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb2O5 samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.
Original languageEnglish
Pages (from-to)C206-C210
JournalApplied Optics
Volume56
Issue number4
DOIs
Publication statusPublished - 1 Feb 2017

Fingerprint

drums
Deposition rates
Dynamic analysis
Sputtering
sputtering
Metals
metals
Oxides
oxides
Distribution functions
Volume fraction
metal films
extinction
simulation
Wavelength
Oxidation
distribution functions
Kinetics
Monitoring
oxidation

Keywords

  • Deposition and fabrication
  • Materials and process characterization
  • Thin films, optical properties

Cite this

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title = "Reactive dynamics analysis of critical Nb2O5 sputtering rate for drum-based metal-like deposition",
abstract = "Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5 deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb2O5 samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.",
keywords = "Deposition and fabrication, Materials and process characterization, Thin films, optical properties",
author = "Shigeng Song and Cheng Li and Chu, {Hin On} and Desmond Gibson",
year = "2017",
month = "2",
day = "1",
doi = "10.1364/AO.56.00C206",
language = "English",
volume = "56",
pages = "C206--C210",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "The Optical Society",
number = "4",

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TY - JOUR

T1 - Reactive dynamics analysis of critical Nb2O5 sputtering rate for drum-based metal-like deposition

AU - Song, Shigeng

AU - Li, Cheng

AU - Chu, Hin On

AU - Gibson, Desmond

PY - 2017/2/1

Y1 - 2017/2/1

N2 - Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5 deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb2O5 samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.

AB - Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5 deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb2O5 samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.

KW - Deposition and fabrication

KW - Materials and process characterization

KW - Thin films, optical properties

U2 - 10.1364/AO.56.00C206

DO - 10.1364/AO.56.00C206

M3 - Article

VL - 56

SP - C206-C210

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 4

ER -