Plasma source

Keyphrases

• Plasma Sources 100%
• Potential Difference 100%
• Axial Magnetic Field 100%
• Plasma Generation 100%
• Field Effect 50%
• Generation Effect 50%
• Plasma Confinement 50%
• Electron Energy Spectrum 50%
• Process Gases 50%
• Ground Magnetic Field 50%
• Thermionic Emitter 50%
• Induction Coil 50%
• Radiofrequency Energy 50%
• Electron Generation 50%
• Conductive Support 50%
• Gasses 50%
• Radiofrequency 50%
• Magnetic-field-induced 50%
• Negative Potential 50%
• Thermic Effect 50%

Physics

• Magnetic Field 100%
• Thermionics 100%
• Plasma Generator 100%
• Energy Spectra 50%
• Field Effect 50%
• Plasma Control 50%