Plasma processing of niobium for the production of thin-film superconducting devices

Engineering & Materials Science

• Superconducting devices 100%
• Thin film devices 96%
• Plasma applications 92%
• Niobium 73%
• Magnetometers 71%
• Thin films 36%
• Plasmas 35%
• Oxidation 34%
• Oxides 33%
• Reactive ion etching 26%
• Superconducting materials 25%
• Photolithography 24%
• Bias voltage 24%
• Cathodes 19%
• Cleaning 18%

Physics & Astronomy

• superconducting devices 80%
• niobium 59%
• magnetometers 43%
• thin films 29%
• oxidation 21%
• oxides 18%
• parallel plates 15%
• Josephson junctions 14%
• cleaning 14%
• lithography 12%
• cathodes 11%
• etching 10%
• sensitivity 8%
• profiles 7%
• electric potential 7%
• ions 6%

Chemical Compounds

• Plasma 36%
• Superconductor 32%
• Oxide 31%
• Etching 26%
• Plate Like Crystal 22%
• Dimension 21%
• Cathode 21%
• Voltage 21%
• Alloy 20%
• Pressure 16%
• Liquid Film 14%
• Oxidation Reaction 13%
• Ion 11%
• Time 10%
• Surface 9%