@inproceedings{148c38d966ea45aca8c5a39b02294c41,
title = "Optical properties of sputter deposited amorphous hydrogenated silicon films",
abstract = "Optical properties of room temperature microwave plasma pulsed DC sputter deposited amorphous hydrogenated silicon are presented. Results show controllable and reproducible reduction in absorption edge and refractive index with increasing hydrogen.",
author = "Des Gibson and Shigeng Song and Cheng Li and David Child",
year = "2016",
month = jun,
day = "19",
doi = "10.1364/OIC.2016.ThC.2",
language = "English",
isbn = "9781943580132",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Optical Interference Coatings 2016",
address = "United States",
note = "Optical Interference Coatings, OIC 2016 ; Conference date: 19-06-2016 Through 24-06-2016",
}