Optical properties of sputter deposited amorphous hydrogenated silicon films

Des Gibson*, Shigeng Song, Cheng Li, David Child

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Abstract

Optical properties of room temperature microwave plasma pulsed DC sputter deposited amorphous hydrogenated silicon are presented. Results show controllable and reproducible reduction in absorption edge and refractive index with increasing hydrogen.

Original languageEnglish
Title of host publicationOptical Interference Coatings 2016
Subtitle of host publicationTucson, Arizona United States 19-24 June 2016
PublisherOptical Society of America
ISBN (Print)9781943580132
DOIs
Publication statusPublished - 19 Jun 2016
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: 19 Jun 201624 Jun 2016

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceOptical Interference Coatings, OIC 2016
Country/TerritoryUnited States
CityTucson
Period19/06/1624/06/16

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