@inproceedings{d6c587a27bc5469397fa35a1b4c8acf2,
title = "Optical and durability properties of microwave plasma assisted sputter deposited stoichiometric silicon nitride",
abstract = "A study of the optical and mechanical properties of stoichiometric Silicon Nitride deposited using microwave plasma assisted sputtering. A coating stress of -317MPa, hardness of 1.3GPa was obtained with a transmittance range of 300nm-5μm.",
author = "Connor Lindsay and \{Garc{\'i}a Nu{\~n}ez\}, Carlos and Lewis Fleming and Ian Brinkley and Stuart Reid and Iain Martin and Des Gibson",
year = "2025",
language = "English",
isbn = "9781957171449",
series = "Technical Digest Series",
publisher = "Optical Society of America",
booktitle = "Optica OIC - Optical Interference Coatings Conference 2025",
address = "United States",
}