On the true optical properties of zinc nitride

C. García Núñez; J.L. Pau; M.J. Hernandez; M. Cervera; J. Piqueras

doi:10.1063/1.3663859

On the true optical properties of zinc nitride

C. García Núñez, J.L. Pau, M.J. Hernandez, M. Cervera, J. Piqueras

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28 Citations (Scopus)

Abstract

Refractive index (n) and extinction coefficient (k) of Zn3N2 layers deposited by radio-frequency magnetron sputtering at temperatures (Ts) between 298 and 523 K were determined by spectroscopic ellipsometry. Results showed strong variations of the apparent optical constants with Ts and time attributed to surface effects. Resonant Rutherford backscattering and spectroscopic ellipsometry confirmed the formation of a ZnO surface layer provoked by the ambient exposure. Samples grown at low Ts presented the lowest surface roughness and exhibited 2.0 < n < 2.8 and 0.6 < k < 1.0 in the 1.5–4.5 eV energy range. The extracted n and k values accurately reproduced the reflectance properties.

Original language	English
Article number	232112
Journal	Applied Physics Letters
Volume	99
Issue number	23
DOIs	https://doi.org/10.1063/1.3663859
Publication status	Published - 8 Dec 2011
Externally published	Yes

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title = "On the true optical properties of zinc nitride",

abstract = "Refractive index (n) and extinction coefficient (k) of Zn3N2 layers deposited by radio-frequency magnetron sputtering at temperatures (Ts) between 298 and 523 K were determined by spectroscopic ellipsometry. Results showed strong variations of the apparent optical constants with Ts and time attributed to surface effects. Resonant Rutherford backscattering and spectroscopic ellipsometry confirmed the formation of a ZnO surface layer provoked by the ambient exposure. Samples grown at low Ts presented the lowest surface roughness and exhibited 2.0 < n < 2.8 and 0.6 < k < 1.0 in the 1.5–4.5 eV energy range. The extracted n and k values accurately reproduced the reflectance properties.",

author = "{Garc{\'i}a N{\'u}{\~n}ez}, C. and J.L. Pau and M.J. Hernandez and M. Cervera and J. Piqueras",

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doi = "10.1063/1.3663859",

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T1 - On the true optical properties of zinc nitride

AU - García Núñez, C.

AU - Pau, J.L.

AU - Hernandez, M.J.

AU - Cervera, M.

AU - Piqueras, J.

PY - 2011/12/8

Y1 - 2011/12/8

N2 - Refractive index (n) and extinction coefficient (k) of Zn3N2 layers deposited by radio-frequency magnetron sputtering at temperatures (Ts) between 298 and 523 K were determined by spectroscopic ellipsometry. Results showed strong variations of the apparent optical constants with Ts and time attributed to surface effects. Resonant Rutherford backscattering and spectroscopic ellipsometry confirmed the formation of a ZnO surface layer provoked by the ambient exposure. Samples grown at low Ts presented the lowest surface roughness and exhibited 2.0 < n < 2.8 and 0.6 < k < 1.0 in the 1.5–4.5 eV energy range. The extracted n and k values accurately reproduced the reflectance properties.

AB - Refractive index (n) and extinction coefficient (k) of Zn3N2 layers deposited by radio-frequency magnetron sputtering at temperatures (Ts) between 298 and 523 K were determined by spectroscopic ellipsometry. Results showed strong variations of the apparent optical constants with Ts and time attributed to surface effects. Resonant Rutherford backscattering and spectroscopic ellipsometry confirmed the formation of a ZnO surface layer provoked by the ambient exposure. Samples grown at low Ts presented the lowest surface roughness and exhibited 2.0 < n < 2.8 and 0.6 < k < 1.0 in the 1.5–4.5 eV energy range. The extracted n and k values accurately reproduced the reflectance properties.

U2 - 10.1063/1.3663859

DO - 10.1063/1.3663859

M3 - Article

SN - 0003-6951

VL - 99

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

M1 - 232112

ER -

On the true optical properties of zinc nitride

Abstract

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