Novel methods of fabrication and metrology of superconducting nanostructures

Ling Hao, John C. Macfarlane, John C. Gallop, David Cox, Patrick Joseph-Franks, David Hutson, Jie Chen, S. K. H. Lam

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


As metrology extends toward the nanoscale, a number of potential applications and new challenges arise. By combining photolithography with focused ion beam and/or electron beam methods, superconducting quantum interference devices (SQUIDs) with loop dimensions down to 200 nm and superconducting bridge dimensions of the order 80 nm have been produced. These SQUIDs have a range of potential applications. As an illustration, we describe a method for characterizing the effective area and the magnetic penetration depth of a structured superconducting thin film in the extreme limit, where the superconducting penetration depth λ is much greater than the film thickness and is comparable with the lateral dimensions of the device.
Original languageEnglish
Pages (from-to)392-396
Number of pages5
JournalIEEE Transactions on Instrumentation and Measurement
Issue number2
Publication statusPublished - Apr 2007
Externally publishedYes


  • magnetic field effects
  • nanotechnology
  • superconducting devices
  • thin films


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