Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

Desmond Gibson; Ewan Waddall; Frank Placido

doi:10.1364/OIC.2013.PTE.1

Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

Desmond Gibson
, Ewan Waddall
, Frank Placido

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

Original language	Undefined/Unknown
Title of host publication	Optical Interference Coatings
Pages	PTE-1
DOIs	https://doi.org/10.1364/OIC.2013.PTE.1
Publication status	Published - 2013

Access to Document

10.1364/OIC.2013.PTE.1

Cite this

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title = "Novel Hollow Cathode Plasma Source with selfsustaining high density plasma",

abstract = "Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.",

author = "Desmond Gibson and Ewan Waddall and Frank Placido",

year = "2013",

doi = "10.1364/OIC.2013.PTE.1",

language = "Undefined/Unknown",

pages = "PTE--1",

booktitle = "Optical Interference Coatings",

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AU - Waddall, Ewan

AU - Placido, Frank

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Y1 - 2013

N2 - Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

AB - Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

U2 - 10.1364/OIC.2013.PTE.1

DO - 10.1364/OIC.2013.PTE.1

M3 - Conference contribution

SP - PTE-1

BT - Optical Interference Coatings

ER -