Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

Desmond Gibson, Ewan Waddall, Frank Placido

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.
Original languageUndefined/Unknown
Title of host publicationOptical Interference Coatings
PagesPTE-1
DOIs
Publication statusPublished - 2013

Cite this

Gibson, D., Waddall, E., & Placido, F. (2013). Novel Hollow Cathode Plasma Source with selfsustaining high density plasma. In Optical Interference Coatings (pp. PTE-1) https://doi.org/10.1364/OIC.2013.PTE.1
Gibson, Desmond ; Waddall, Ewan ; Placido, Frank. / Novel Hollow Cathode Plasma Source with selfsustaining high density plasma. Optical Interference Coatings. 2013. pp. PTE-1
@inproceedings{e24de5ef5f33472ba4f7e14cf7a21346,
title = "Novel Hollow Cathode Plasma Source with selfsustaining high density plasma",
abstract = "Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.",
author = "Desmond Gibson and Ewan Waddall and Frank Placido",
year = "2013",
doi = "10.1364/OIC.2013.PTE.1",
language = "Undefined/Unknown",
pages = "PTE--1",
booktitle = "Optical Interference Coatings",

}

Novel Hollow Cathode Plasma Source with selfsustaining high density plasma. / Gibson, Desmond; Waddall, Ewan; Placido, Frank.

Optical Interference Coatings. 2013. p. PTE-1.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

AU - Gibson, Desmond

AU - Waddall, Ewan

AU - Placido, Frank

PY - 2013

Y1 - 2013

N2 - Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

AB - Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

U2 - 10.1364/OIC.2013.PTE.1

DO - 10.1364/OIC.2013.PTE.1

M3 - Conference contribution

SP - PTE-1

BT - Optical Interference Coatings

ER -