Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.
|Title of host publication||Optical Interference Coatings|
|Publication status||Published - 2013|
Gibson, D., Waddall, E., & Placido, F. (2013). Novel Hollow Cathode Plasma Source with selfsustaining high density plasma. In Optical Interference Coatings (pp. PTE-1) https://doi.org/10.1364/OIC.2013.PTE.1