Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

Desmond Gibson, Ewan Waddall, Frank Placido

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.
Original languageUndefined/Unknown
Title of host publicationOptical Interference Coatings
PagesPTE-1
DOIs
Publication statusPublished - 2013

Cite this

Gibson, D., Waddall, E., & Placido, F. (2013). Novel Hollow Cathode Plasma Source with selfsustaining high density plasma. In Optical Interference Coatings (pp. PTE-1) https://doi.org/10.1364/OIC.2013.PTE.1