Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

Desmond Gibson, Ewan Waddall, Frank Placido

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.
Original languageUndefined/Unknown
Title of host publicationOptical Interference Coatings
PagesPTE-1
DOIs
Publication statusPublished - 2013

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