Novel hollow cathode plasma source with self sustaining high density plasma

D. Gibson; E. Waddell; D. Child; F. Placido

Novel hollow cathode plasma source with self sustaining high density plasma

D. Gibson
, E. Waddell
, D. Child
, F. Placido

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
Publisher	OSA Publishing
Volume	Washington, DC
ISBN (Print)	9781557529701
Publication status	Published - 16 Jun 2013

Keywords

coatings
fiber optic sensors
light interference
plasma sources

Cite this

@inproceedings{264beb48fdd54f5192e7deee2ad40fd1,

title = "Novel hollow cathode plasma source with self sustaining high density plasma",

abstract = "Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.",

keywords = "coatings, fiber optic sensors, light interference, plasma sources",

author = "D. Gibson and E. Waddell and D. Child and F. Placido",

year = "2013",

month = jun,

day = "16",

language = "English",

isbn = "9781557529701",

volume = "Washington, DC",

booktitle = "Optics InfoBase Conference Papers",

publisher = "OSA Publishing",

address = "United States",

}

TY - GEN

T1 - Novel hollow cathode plasma source with self sustaining high density plasma

AU - Gibson, D.

AU - Waddell, E.

AU - Child, D.

AU - Placido, F.

PY - 2013/6/16

Y1 - 2013/6/16

N2 - Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

AB - Description of a plasma source including a LaB6 hollow cathode hybrid configuration operating at low gas flows and low deposition pressures provides self-sustaining plasma generation over large areas.

KW - coatings

KW - fiber optic sensors

KW - light interference

KW - plasma sources

UR - https://www.scopus.com/pages/publications/84898078391

M3 - Conference contribution

SN - 9781557529701

VL - Washington, DC

BT - Optics InfoBase Conference Papers

PB - OSA Publishing

ER -

Novel hollow cathode plasma source with self sustaining high density plasma

Abstract

Keywords

Other files and links

Fingerprint

Cite this