Nanostructured ZnO films prepared by hydro-thermal chemical deposition and microwave-activated reactive sputtering

Yahya Alajlani, Frank Placido, Desmond Gibson, Hin On Chu, Shigeng Song, Liz Porteous, Sarfraz Moh

Research output: Contribution to journalArticle

4 Citations (Scopus)


Nanostructured, highly porous, films of zinc oxide have been prepared by hydro-thermal chemical deposition and by microwave-activated reactive sputtering for applications in sensors and solar cells. Scanning electron microscopy, X-ray diffraction, optical constant measurements, and Raman spectroscopy are presented demonstrating the pronounced effect of microwave power on the nanostructure of films prepared by microwave-activated reactive sputtering and the marked differences between films grown by the two methods. While the structures obtained by hydro-thermal chemical deposition are highly crystalline and grow as nanorods, the microwave-activated reactive sputtering films are initially dense with subsequent increase in porosity, leading to unusual cylindrical structures with hemi-spherical caps.
Original languageEnglish
Pages (from-to)16-20
Number of pages5
JournalSurface & Coatings Technology
Early online date22 Jan 2016
Publication statusPublished - 25 Mar 2016



  • Nanorods
  • Sputtering
  • ZnO
  • Crystallinity

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