Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret*, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, Peter Mackay

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Engineering & Materials Science

Chemical Compounds