Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret; Des Gibson; Lewis Fleming; Shigeng Song; Greg McGann; Sam Ahmadzadeh; Peter Mackay

doi:10.1364/OIC.2022.ThC.7

Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret^*, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, Peter Mackay

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Abstract

Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

Original language	English
Title of host publication	Optical Interference Coatings Conference (OIC) 2022
Editors	R. Sargent, A. Sytchkova
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/OIC.2022.ThC.7
Publication status	Published - 2022
Event	Optical Interference Coatings, OIC 2022 - Vancouver, Canada Duration: 19 Jun 2022 → 24 Jun 2022

Publication series

Name	Technical Digest Papers
Publisher	Optica Publishing Group

Conference

Conference	Optical Interference Coatings, OIC 2022
Country/Territory	Canada
City	Vancouver
Period	19/06/22 → 24/06/22

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10.1364/OIC.2022.ThC.7

2022 03 18 Pomfret et al Microwave acceptedAccepted author manuscript, 843 KB

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Pomfret, J., Gibson, D., Fleming, L., Song, S., McGann, G., Ahmadzadeh, S., & Mackay, P. (2022). Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors. In R. Sargent, & A. Sytchkova (Eds.), Optical Interference Coatings Conference (OIC) 2022 Article ThC.7 (Technical Digest Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/OIC.2022.ThC.7

Pomfret, Jonathan ; Gibson, Des ; Fleming, Lewis et al. / Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors. Optical Interference Coatings Conference (OIC) 2022. editor / R. Sargent ; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. (Technical Digest Papers).

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title = "Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors",

abstract = "Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.",

author = "Jonathan Pomfret and Des Gibson and Lewis Fleming and Shigeng Song and Greg McGann and Sam Ahmadzadeh and Peter Mackay",

note = "Publisher Copyright: {\textcopyright} 2022 TheAuthor(s); Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

year = "2022",

doi = "10.1364/OIC.2022.ThC.7",

language = "English",

series = "Technical Digest Papers",

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Pomfret, J, Gibson, D, Fleming, L, Song, S, McGann, G, Ahmadzadeh, S & Mackay, P 2022, Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors. in R Sargent & A Sytchkova (eds), Optical Interference Coatings Conference (OIC) 2022., ThC.7, Technical Digest Papers, Optica Publishing Group (formerly OSA), Optical Interference Coatings, OIC 2022, Vancouver, Canada, 19/06/22. https://doi.org/10.1364/OIC.2022.ThC.7

Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors. / Pomfret, Jonathan; Gibson, Des; Fleming, Lewis et al.
Optical Interference Coatings Conference (OIC) 2022. ed. / R. Sargent; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. ThC.7 (Technical Digest Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

AU - Pomfret, Jonathan

AU - Gibson, Des

AU - Fleming, Lewis

AU - Song, Shigeng

AU - McGann, Greg

AU - Ahmadzadeh, Sam

AU - Mackay, Peter

PY - 2022

Y1 - 2022

N2 - Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

AB - Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

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U2 - 10.1364/OIC.2022.ThC.7

DO - 10.1364/OIC.2022.ThC.7

M3 - Conference contribution

AN - SCOPUS:85139128363

T3 - Technical Digest Papers

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group (formerly OSA)

T2 - Optical Interference Coatings, OIC 2022

Y2 - 19 June 2022 through 24 June 2022

ER -

Pomfret J, Gibson D, Fleming L, Song S, McGann G, Ahmadzadeh S et al. Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors. In Sargent R, Sytchkova A, editors, Optical Interference Coatings Conference (OIC) 2022. Optica Publishing Group (formerly OSA). 2022. ThC.7. (Technical Digest Papers). doi: 10.1364/OIC.2022.ThC.7

Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

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