@inproceedings{919f3d97f4f84d42a97558e3980daec7,
title = "Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors",
abstract = "Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.",
author = "Jonathan Pomfret and Des Gibson and Lewis Fleming and Shigeng Song and Greg McGann and Sam Ahmadzadeh and Peter Mackay",
note = "Publisher Copyright: {\textcopyright} 2022 TheAuthor(s); Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",
year = "2022",
doi = "10.1364/OIC.2022.ThC.7",
language = "English",
series = "Technical Digest Papers",
publisher = "Optica Publishing Group (formerly OSA)",
editor = "R. Sargent and A. Sytchkova",
booktitle = "Optical Interference Coatings Conference (OIC) 2022",
}