Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret*, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, Peter Mackay

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Downloads (Pure)

Abstract

Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

Original languageEnglish
Title of host publicationOptical Interference Coatings Conference (OIC) 2022
EditorsR. Sargent, A. Sytchkova
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
DOIs
Publication statusPublished - 2022
EventOptical Interference Coatings, OIC 2022 - Vancouver, Canada
Duration: 19 Jun 202224 Jun 2022

Publication series

NameTechnical Digest Papers
PublisherOptica Publishing Group

Conference

ConferenceOptical Interference Coatings, OIC 2022
Country/TerritoryCanada
CityVancouver
Period19/06/2224/06/22

Fingerprint

Dive into the research topics of 'Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors'. Together they form a unique fingerprint.

Cite this