Microwave plasma assisted magnetron sputtering of infrared multilayer thin film bandpass filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret*, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, Peter Mackay

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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    Abstract

    Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

    Original languageEnglish
    Title of host publicationOptical Interference Coatings Conference (OIC) 2022
    EditorsR. Sargent, A. Sytchkova
    PublisherOptica Publishing Group (formerly OSA)
    ISBN (Electronic)9781557528209
    DOIs
    Publication statusPublished - 2022
    EventOptical Interference Coatings, OIC 2022 - Vancouver, Canada
    Duration: 19 Jun 202224 Jun 2022

    Publication series

    NameTechnical Digest Papers
    PublisherOptica Publishing Group

    Conference

    ConferenceOptical Interference Coatings, OIC 2022
    Country/TerritoryCanada
    CityVancouver
    Period19/06/2224/06/22

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