Mechanical dissipation in silicon flexures

S. Reid; G. Cagnoli; D.R.M. Crooks; J. Hough; P. Murray; S. Rowan; M.M. Fejer; R. Route; S. Zappe

doi:10.1016/j.physleta.2005.10.103

Mechanical dissipation in silicon flexures

S. Reid
, G. Cagnoli
, D.R.M. Crooks
, J. Hough
, P. Murray
, S. Rowan
, M.M. Fejer
, R. Route
, S. Zappe

Research output: Contribution to journal › Article › peer-review

74 Citations (Scopus)

Abstract

The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to ϕ=4.4×10−7.

Original language	English
Pages (from-to)	205-211
Number of pages	7
Journal	Physics Letters A
Volume	351
Issue number	4-5
DOIs	https://doi.org/10.1016/j.physleta.2005.10.103
Publication status	Published - 6 Mar 2006
Externally published	Yes

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10.1016/j.physleta.2005.10.103

Cite this

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title = "Mechanical dissipation in silicon flexures",

abstract = "The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to ϕ=4.4×10−7.",

author = "S. Reid and G. Cagnoli and D.R.M. Crooks and J. Hough and P. Murray and S. Rowan and M.M. Fejer and R. Route and S. Zappe",

year = "2006",

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language = "English",

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T1 - Mechanical dissipation in silicon flexures

AU - Reid, S.

AU - Cagnoli, G.

AU - Crooks, D.R.M.

AU - Hough, J.

AU - Murray, P.

AU - Rowan, S.

AU - Fejer, M.M.

AU - Route, R.

AU - Zappe, S.

PY - 2006/3/6

Y1 - 2006/3/6

N2 - The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to ϕ=4.4×10−7.

AB - The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to ϕ=4.4×10−7.

U2 - 10.1016/j.physleta.2005.10.103

DO - 10.1016/j.physleta.2005.10.103

M3 - Article

SN - 0375-9601

VL - 351

SP - 205

EP - 211

JO - Physics Letters A

JF - Physics Letters A

IS - 4-5

ER -

Mechanical dissipation in silicon flexures

Abstract

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