Mechanical dissipation in silicon flexures

S. Reid, G. Cagnoli, D.R.M. Crooks, J. Hough, P. Murray, S. Rowan, M.M. Fejer, R. Route, S. Zappe

Research output: Contribution to journalArticlepeer-review

70 Citations (Scopus)

Abstract

The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to ϕ=4.4×10−7.
Original languageEnglish
Pages (from-to)205-211
Number of pages7
JournalPhysics Letters A
Volume351
Issue number4-5
DOIs
Publication statusPublished - 6 Mar 2006
Externally publishedYes

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