Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B. Oliver; Pete Kupinski; Amy L. Rigatti; Ansgar W. Schmid; John C. Lambropoulos; Semyon Papernov; Alexei Kozlov; John Spaulding; Daniel Sadowski; Z. Roman Chrzan; Robert D. Hand; Desmond R. Gibson; Ian Brinkley; Frank Placido

doi:10.1364/AO.50.000C19

Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B. Oliver
, Pete Kupinski
, Amy L. Rigatti
, Ansgar W. Schmid
, John C. Lambropoulos
, Semyon Papernov
, Alexei Kozlov
, John Spaulding
, Daniel Sadowski
, Z. Roman Chrzan
, Robert D. Hand
, Desmond R. Gibson
, Ian Brinkley
, Frank Placido

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

Original language	English
Pages (from-to)	C19-C26
Number of pages	8
Journal	Applied Optics
Volume	50
Issue number	9
DOIs	https://doi.org/10.1364/AO.50.000C19
Publication status	Published - 20 Mar 2011

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Oliver, J. B., Kupinski, P., Rigatti, A. L., Schmid, A. W., Lambropoulos, J. C., Papernov, S., Kozlov, A., Spaulding, J., Sadowski, D., Chrzan, Z. R., Hand, R. D., Gibson, D. R., Brinkley, I., & Placido, F. (2011). Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings. Applied Optics, 50(9), C19-C26. https://doi.org/10.1364/AO.50.000C19

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title = "Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings",

abstract = "Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.",

author = "Oliver, \{James B.\} and Pete Kupinski and Rigatti, \{Amy L.\} and Schmid, \{Ansgar W.\} and Lambropoulos, \{John C.\} and Semyon Papernov and Alexei Kozlov and John Spaulding and Daniel Sadowski and Chrzan, \{Z. Roman\} and Hand, \{Robert D.\} and Gibson, \{Desmond R.\} and Ian Brinkley and Frank Placido",

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doi = "10.1364/AO.50.000C19",

language = "English",

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AU - Oliver, James B.

AU - Kupinski, Pete

AU - Rigatti, Amy L.

AU - Schmid, Ansgar W.

AU - Lambropoulos, John C.

AU - Papernov, Semyon

AU - Kozlov, Alexei

AU - Spaulding, John

AU - Sadowski, Daniel

AU - Chrzan, Z. Roman

AU - Hand, Robert D.

AU - Gibson, Desmond R.

AU - Brinkley, Ian

AU - Placido, Frank

PY - 2011/3/20

Y1 - 2011/3/20

N2 - Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

AB - Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

U2 - 10.1364/AO.50.000C19

DO - 10.1364/AO.50.000C19

M3 - Article

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VL - 50

SP - C19-C26

JO - Applied Optics

JF - Applied Optics

IS - 9

ER -

Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

Abstract

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