Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B. Oliver; Pete Kupinski; Amy L. Rigatti; Ansgar W. Schmid; John C. Lambropoulos; Semyon Papernov; Alexei Kozlov; John Spaulding; Daniel Sadowski; Z. Roman Chrzan; Robert D. Hand; Desmond R. Gibson; Ian Brinkley; Frank Placido

doi:10.1364/AO.50.000C19

Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B. Oliver, Pete Kupinski, Amy L. Rigatti, Ansgar W. Schmid, John C. Lambropoulos, Semyon Papernov, Alexei Kozlov, John Spaulding, Daniel Sadowski, Z. Roman Chrzan, Robert D. Hand, Desmond R. Gibson, Ian Brinkley, Frank Placido

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

Original language	English
Pages (from-to)	C19-C26
Number of pages	8
Journal	Applied Optics
Volume	50
Issue number	9
DOIs	https://doi.org/10.1364/AO.50.000C19
Publication status	Published - 20 Mar 2011

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Oliver, J. B., Kupinski, P., Rigatti, A. L., Schmid, A. W., Lambropoulos, J. C., Papernov, S., Kozlov, A., Spaulding, J., Sadowski, D., Chrzan, Z. R., Hand, R. D., Gibson, D. R., Brinkley, I., & Placido, F. (2011). Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings. Applied Optics, 50(9), C19-C26. https://doi.org/10.1364/AO.50.000C19

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title = "Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings",

abstract = "Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.",

author = "Oliver, {James B.} and Pete Kupinski and Rigatti, {Amy L.} and Schmid, {Ansgar W.} and Lambropoulos, {John C.} and Semyon Papernov and Alexei Kozlov and John Spaulding and Daniel Sadowski and Chrzan, {Z. Roman} and Hand, {Robert D.} and Gibson, {Desmond R.} and Ian Brinkley and Frank Placido",

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language = "English",

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AU - Oliver, James B.

AU - Kupinski, Pete

AU - Rigatti, Amy L.

AU - Schmid, Ansgar W.

AU - Lambropoulos, John C.

AU - Papernov, Semyon

AU - Kozlov, Alexei

AU - Spaulding, John

AU - Sadowski, Daniel

AU - Chrzan, Z. Roman

AU - Hand, Robert D.

AU - Gibson, Desmond R.

AU - Brinkley, Ian

AU - Placido, Frank

PY - 2011/3/20

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N2 - Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

AB - Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

U2 - 10.1364/AO.50.000C19

DO - 10.1364/AO.50.000C19

M3 - Article

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VL - 50

SP - C19-C26

JO - Applied Optics

JF - Applied Optics

IS - 9

ER -

Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

Abstract

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