Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B. Oliver, Pete Kupinski, Amy L. Rigatti, Ansgar W. Schmid, John C. Lambropoulos, Semyon Papernov, Alexei Kozlov, John Spaulding, Daniel Sadowski, Z. Roman Chrzan, Robert D. Hand, Desmond R. Gibson, Ian Brinkley, Frank Placido

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Abstract

Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.
Original languageEnglish
Pages (from-to)C19-C26
Number of pages8
JournalApplied Optics
Volume50
Issue number9
DOIs
Publication statusPublished - 20 Mar 2011

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