Large-aperture plasma-assisted deposition of ICF laser coatings

  • J. B. Oliver
  • , P. Kupinski
  • , A. L. Rigatti
  • , A. W. Schmid
  • , J. Lambropoulos
  • , S. Papernov
  • , A. Kozlov
  • , J. Spaulding
  • , D. Sadowski
  • , Z. Chrzan
  • , R. Hand
  • , D. R. Gibson
  • , I. Brinkley
  • , F. Placido

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of largeaperture, high-fluence coatings used in vacuum for substrates 1 m in aperture.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2010
Publication statusPublished - 2010
EventOptical Interference Coatings, OIC 2010 - Tucson, AZ, United States
Duration: 6 Jun 201011 Jun 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Interference Coatings, OIC 2010
Country/TerritoryUnited States
CityTucson, AZ
Period6/06/1011/06/10

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