Influence of concentration of vanadium in zinc oxide on structural and optical properties with lower concentration

Wang Li-Wei, Xu Zheng, Meng Li-Jian, Vasco Teixeira, Song Shi-Geng, Xu Xu-Rong

Research output: Contribution to journalArticle

Abstract

ZnO films doped with different vanadium concentrations are deposited onto glass substrates by dc reactive magnetron sputtering using a zinc target doped with vanadium. The vanadium concentrations are examined by energy dispersive spectroscopy (EDS) and the charge state of vanadium in ZnO thin films is characterized by x-ray photoelectron spectroscopy. The results of x-ray diffraction (XRD) show that all the films have a wurtzite structure and grow mainly in the c-axis orientation. The grain size and residual stress in the deposited films are estimated by fitting the XRD results. The optical properties of the films are studied by measuring the transmittance. The optical constants (refractive index and extinction coefficient) and the film thickness are obtained by fitting the transmittance. All the results are discussed in relation with the doping of the vanadium.
Original languageEnglish
Article number077801
JournalChinese Physics Letters
Volume26
Issue number7
DOIs
Publication statusPublished - Jul 2009
Externally publishedYes

Cite this

Wang Li-Wei ; Xu Zheng ; Meng Li-Jian ; Teixeira, Vasco ; Song Shi-Geng ; Xu Xu-Rong. / Influence of concentration of vanadium in zinc oxide on structural and optical properties with lower concentration. In: Chinese Physics Letters. 2009 ; Vol. 26, No. 7.
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Influence of concentration of vanadium in zinc oxide on structural and optical properties with lower concentration. / Wang Li-Wei; Xu Zheng; Meng Li-Jian; Teixeira, Vasco; Song Shi-Geng; Xu Xu-Rong.

In: Chinese Physics Letters, Vol. 26, No. 7, 077801, 07.2009.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Influence of concentration of vanadium in zinc oxide on structural and optical properties with lower concentration

AU - Wang Li-Wei, null

AU - Xu Zheng, null

AU - Meng Li-Jian, null

AU - Teixeira, Vasco

AU - Song Shi-Geng, null

AU - Xu Xu-Rong, null

PY - 2009/7

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AB - ZnO films doped with different vanadium concentrations are deposited onto glass substrates by dc reactive magnetron sputtering using a zinc target doped with vanadium. The vanadium concentrations are examined by energy dispersive spectroscopy (EDS) and the charge state of vanadium in ZnO thin films is characterized by x-ray photoelectron spectroscopy. The results of x-ray diffraction (XRD) show that all the films have a wurtzite structure and grow mainly in the c-axis orientation. The grain size and residual stress in the deposited films are estimated by fitting the XRD results. The optical properties of the films are studied by measuring the transmittance. The optical constants (refractive index and extinction coefficient) and the film thickness are obtained by fitting the transmittance. All the results are discussed in relation with the doping of the vanadium.

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