Influence of europium on structure modification of TiO₂ thin films prepared by high energy magnetron sputtering process

In this work modification of TiO₂ thin films structure by doping with europium was described. Nanocrystalline films were prepared by high energy magnetron sputtering process. The influence of europium on the microstructure of TiO₂ was determined based on the results of X-ray diffraction, transmission electron microscopy, Raman spectroscopy and photoluminescence measurements. It was found that undoped film had rutile structure directly after deposition (without additional annealing), while 0.2 at.% and 0.4 at.% of the dopant was sufficient to receive TiO₂ films with anatase form. The type of structure was confirmed with the aid of Raman spectroscopy and by TEM observations. The amount of Eu-dopant had direct impact on PL intensity as well as presence of defect (voids) in the film.