@inproceedings{2f82cb42fa8b42fa8d53a95867cdade6,
title = "High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers",
abstract = "Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.",
author = "Lewis Fleming and Des Gibson and Shigeng Song and David Hutson and Sam Ahmadzadeh and Sijia Cai and Daxing Han and Ewan Waddell and John Saffell",
year = "2022",
doi = "10.1364/OIC.2022.ThC.4",
language = "English",
series = "Technical Digest Papers",
publisher = "Optica Publishing Group (formerly OSA)",
editor = "R. Sargent and A. Sytchkova",
booktitle = "Optical Interference Coatings Conference (OIC) 2022",
note = "Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",
}