High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

Lewis Fleming, Des Gibson, Shigeng Song, David Hutson, Sam Ahmadzadeh, Sijia Cai, Daxing Han, Ewan Waddell, John Saffell

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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    Abstract

    Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.

    Original languageEnglish
    Title of host publicationOptical Interference Coatings Conference (OIC) 2022
    EditorsR. Sargent, A. Sytchkova
    Place of PublicationWashington, DC
    PublisherOptica Publishing Group (formerly OSA)
    ISBN (Electronic)9781957171043
    DOIs
    Publication statusPublished - 2022
    EventOptical Interference Coatings, OIC 2022 - Vancouver, Canada
    Duration: 19 Jun 202224 Jun 2022

    Publication series

    NameTechnical Digest Papers
    PublisherOptica Publishing Group

    Conference

    ConferenceOptical Interference Coatings, OIC 2022
    Country/TerritoryCanada
    CityVancouver
    Period19/06/2224/06/22

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