High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

Lewis Fleming; Des Gibson; Shigeng Song; David Hutson; Sam Ahmadzadeh; Sijia Cai; Daxing Han; Ewan Waddell; John Saffell

doi:10.1364/OIC.2022.ThC.4

High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

Lewis Fleming, Des Gibson, Shigeng Song, David Hutson, Sam Ahmadzadeh, Sijia Cai, Daxing Han, Ewan Waddell, John Saffell

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Abstract

Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.

Original language	English
Title of host publication	Optical Interference Coatings Conference (OIC) 2022
Editors	R. Sargent, A. Sytchkova
Place of Publication	Washington, DC
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781957171043
DOIs	https://doi.org/10.1364/OIC.2022.ThC.4
Publication status	Published - 2022
Event	Optical Interference Coatings, OIC 2022 - Vancouver, Canada Duration: 19 Jun 2022 → 24 Jun 2022

Publication series

Name	Technical Digest Papers
Publisher	Optica Publishing Group

Conference

Conference	Optical Interference Coatings, OIC 2022
Country/Territory	Canada
City	Vancouver
Period	19/06/22 → 24/06/22

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10.1364/OIC.2022.ThC.4

2021 03 31 Fleming et al Plasma acceptedAccepted author manuscript, 331 KB

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Fleming, L., Gibson, D., Song, S., Hutson, D., Ahmadzadeh, S., Cai, S., Han, D., Waddell, E., & Saffell, J. (2022). High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers. In R. Sargent, & A. Sytchkova (Eds.), Optical Interference Coatings Conference (OIC) 2022 [ThC.4] (Technical Digest Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/OIC.2022.ThC.4

Fleming, Lewis ; Gibson, Des ; Song, Shigeng et al. / High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers. Optical Interference Coatings Conference (OIC) 2022. editor / R. Sargent ; A. Sytchkova. Washington, DC : Optica Publishing Group (formerly OSA), 2022. (Technical Digest Papers).

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title = "High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers",

abstract = "Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.",

author = "Lewis Fleming and Des Gibson and Shigeng Song and David Hutson and Sam Ahmadzadeh and Sijia Cai and Daxing Han and Ewan Waddell and John Saffell",

year = "2022",

doi = "10.1364/OIC.2022.ThC.4",

language = "English",

series = "Technical Digest Papers",

publisher = "Optica Publishing Group (formerly OSA)",

editor = "R. Sargent and A. Sytchkova",

booktitle = "Optical Interference Coatings Conference (OIC) 2022",

note = "Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

}

Fleming, L, Gibson, D , Song, S , Hutson, D, Ahmadzadeh, S, Cai, S , Han, D, Waddell, E & Saffell, J 2022, High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers. in R Sargent & A Sytchkova (eds), Optical Interference Coatings Conference (OIC) 2022., ThC.4, Technical Digest Papers, Optica Publishing Group (formerly OSA), Washington, DC, Optical Interference Coatings, OIC 2022, Vancouver, Canada, 19/06/22. https://doi.org/10.1364/OIC.2022.ThC.4

High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers. / Fleming, Lewis; Gibson, Des ; Song, Shigeng et al.

Optical Interference Coatings Conference (OIC) 2022. ed. / R. Sargent; A. Sytchkova. Washington, DC : Optica Publishing Group (formerly OSA), 2022. ThC.4 (Technical Digest Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

AU - Fleming, Lewis

AU - Gibson, Des

AU - Song, Shigeng

AU - Hutson, David

AU - Ahmadzadeh, Sam

AU - Cai, Sijia

AU - Han, Daxing

AU - Waddell, Ewan

AU - Saffell, John

PY - 2022

Y1 - 2022

N2 - Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.

AB - Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.

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U2 - 10.1364/OIC.2022.ThC.4

DO - 10.1364/OIC.2022.ThC.4

M3 - Conference contribution

AN - SCOPUS:85139143616

T3 - Technical Digest Papers

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group (formerly OSA)

CY - Washington, DC

T2 - Optical Interference Coatings, OIC 2022

Y2 - 19 June 2022 through 24 June 2022

ER -

Fleming L, Gibson D , Song S , Hutson D, Ahmadzadeh S, Cai S et al. High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers. In Sargent R, Sytchkova A, editors, Optical Interference Coatings Conference (OIC) 2022. Washington, DC: Optica Publishing Group (formerly OSA). 2022. ThC.4. (Technical Digest Papers). doi: 10.1364/OIC.2022.ThC.4

High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

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