High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver, Jonathan Pomfret, Des Gibson*, Lewis Fleming, Sam Ahmadzadeh, Greg McGann, Shigeng Song, Parnia Navabpour, Hailin Sun, Peter Mackay

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering

Material Science