High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver, Jonathan Pomfret, Des Gibson*, Lewis Fleming, Sam Ahmadzadeh, Greg McGann, Shigeng Song, Parnia Navabpour, Hailin Sun, Peter Mackay

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Abstract

Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

Original languageEnglish
Title of host publicationOptical Interference Coatings Conference (OIC) 2022
EditorsR. Sargent, A. Sytchkova
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
DOIs
Publication statusPublished - 2022
EventOptical Interference Coatings, OIC 2022 - Vancouver, Canada
Duration: 19 Jun 202224 Jun 2022

Publication series

NameTechnical Digest Papers
PublisherOptica Publishing Group

Conference

ConferenceOptical Interference Coatings, OIC 2022
Country/TerritoryCanada
CityVancouver
Period19/06/2224/06/22

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