High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver; Jonathan Pomfret; Des Gibson; Lewis Fleming; Sam Ahmadzadeh; Greg McGann; Shigeng Song; Parnia Navabpour; Hailin Sun; Peter Mackay

doi:10.1364/OIC.2022.WD.4

High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver, Jonathan Pomfret, Des Gibson^*, Lewis Fleming, Sam Ahmadzadeh, Greg McGann, Shigeng Song, Parnia Navabpour, Hailin Sun, Peter Mackay

^*Corresponding author for this work

School of Computing, Engineering and Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Abstract

Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al₂O₃ protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

Original language	English
Title of host publication	Optical Interference Coatings Conference (OIC) 2022
Editors	R. Sargent, A. Sytchkova
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/OIC.2022.WD.4
Publication status	Published - 2022
Event	Optical Interference Coatings, OIC 2022 - Vancouver, Canada Duration: 19 Jun 2022 → 24 Jun 2022

Publication series

Name	Technical Digest Papers
Publisher	Optica Publishing Group

Conference

Conference	Optical Interference Coatings, OIC 2022
Country/Territory	Canada
City	Vancouver
Period	19/06/22 → 24/06/22

Access to Document

10.1364/OIC.2022.WD.4

2022 03 18 Oliver et al High acceptedAccepted author manuscript, 271 KB

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Oliver, G., Pomfret, J., Gibson, D., Fleming, L., Ahmadzadeh, S., McGann, G., Song, S., Navabpour, P., Sun, H., & Mackay, P. (2022). High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors. In R. Sargent, & A. Sytchkova (Eds.), Optical Interference Coatings Conference (OIC) 2022 Article WD.4 (Technical Digest Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/OIC.2022.WD.4

Oliver, Greig ; Pomfret, Jonathan ; Gibson, Des et al. / High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors. Optical Interference Coatings Conference (OIC) 2022. editor / R. Sargent ; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. (Technical Digest Papers).

@inproceedings{0489369557b443af8c47e941d57e4056,

title = "High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors",

abstract = "Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.",

author = "Greig Oliver and Jonathan Pomfret and Des Gibson and Lewis Fleming and Sam Ahmadzadeh and Greg McGann and Shigeng Song and Parnia Navabpour and Hailin Sun and Peter Mackay",

year = "2022",

doi = "10.1364/OIC.2022.WD.4",

language = "English",

series = "Technical Digest Papers",

publisher = "Optica Publishing Group (formerly OSA)",

editor = "R. Sargent and A. Sytchkova",

booktitle = "Optical Interference Coatings Conference (OIC) 2022",

note = "Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

}

Oliver, G, Pomfret, J, Gibson, D, Fleming, L, Ahmadzadeh, S, McGann, G, Song, S, Navabpour, P, Sun, H & Mackay, P 2022, High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors. in R Sargent & A Sytchkova (eds), Optical Interference Coatings Conference (OIC) 2022., WD.4, Technical Digest Papers, Optica Publishing Group (formerly OSA), Optical Interference Coatings, OIC 2022, Vancouver, Canada, 19/06/22. https://doi.org/10.1364/OIC.2022.WD.4

High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors. / Oliver, Greig; Pomfret, Jonathan; Gibson, Des et al.
Optical Interference Coatings Conference (OIC) 2022. ed. / R. Sargent; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. WD.4 (Technical Digest Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

AU - Oliver, Greig

AU - Pomfret, Jonathan

AU - Gibson, Des

AU - Fleming, Lewis

AU - Ahmadzadeh, Sam

AU - McGann, Greg

AU - Song, Shigeng

AU - Navabpour, Parnia

AU - Sun, Hailin

AU - Mackay, Peter

PY - 2022

Y1 - 2022

N2 - Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

AB - Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

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U2 - 10.1364/OIC.2022.WD.4

DO - 10.1364/OIC.2022.WD.4

M3 - Conference contribution

AN - SCOPUS:85139145868

T3 - Technical Digest Papers

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group (formerly OSA)

T2 - Optical Interference Coatings, OIC 2022

Y2 - 19 June 2022 through 24 June 2022

ER -

Oliver G, Pomfret J, Gibson D, Fleming L, Ahmadzadeh S, McGann G et al. High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors. In Sargent R, Sytchkova A, editors, Optical Interference Coatings Conference (OIC) 2022. Optica Publishing Group (formerly OSA). 2022. WD.4. (Technical Digest Papers). doi: 10.1364/OIC.2022.WD.4

High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

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