High-rate deposition of optical coatings by closed-field magnetron sputtering

D.R. Gibson, I. Brinkley, E.M. Waddell, J.M. Walls

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

"Closed field" magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings and thin films required in a wide range of optical applications. CFM sputtering uses two or more different metal targets to deposit multilayers comprising a wide range of dielectrics, metals and conductive oxides. Moreover, CFM provides a room temperature deposition process with high ion current density, low bias voltage and reactive oxidation in the entire volume around the rotating substrate drum carrier, thereby producing films over a large surface area at high deposition rate with excellent and reproducible optical properties. Machines based on the Closed Field are scaleable to meet a range of batch and in-line size requirements. Typically, thin film thickness control to <±1% is accomplished simply using time. Fine layer thickness control and deposition of graded index layers is also assisted with a specially designed rotating shutter mechanism. The CFM configuration also allows plasma treatment of surfaces prior to deposition, allowing optimisation of coating adhesion to substrates such as plastics. This paper presents data on optical, durability and environmental properties for CFM deposited optical coatings, including anti-reflection, IR blocker and colour control and thermal control filters, graded coatings, as well as conductive transparent oxides such as indium tin oxide. Benefits of the CFM sputter process for a range of optical applications are described.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Original languageEnglish
Title of host publicationAdvances in Optical Thin Films II
EditorsClaude Amra, Norbert Kaiser, H.Angus MacLeod
PublisherSociety of Photo-Optical Instrumentation Engineers
Number of pages11
DOIs
Publication statusPublished - 5 Oct 2005
Externally publishedYes
EventOptical Systems Design, Advances in Optical Thin Films II Conference - Jena, Germany
Duration: 12 Sep 200516 Sep 2005

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume5963
ISSN (Print)0277-786x

Conference

ConferenceOptical Systems Design, Advances in Optical Thin Films II Conference
Country/TerritoryGermany
CityJena
Period12/09/0516/09/05

Keywords

  • Metals
  • Oxides
  • Optical coatings
  • Oxidation
  • Sputter Deposition
  • Camera Shutters

Fingerprint

Dive into the research topics of 'High-rate deposition of optical coatings by closed-field magnetron sputtering'. Together they form a unique fingerprint.

Cite this