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High precision detection of change in intermediate range order of amorphous zirconia-doped tantala thin films due to annealing

  • K. Prasai*
  • , J. Jiang
  • , A. Mishkin
  • , B. Shyam
  • , S. Angelova
  • , R. Birney
  • , D.A. Drabold
  • , M. Fazio
  • , E.K. Gustafson
  • , G. Harry
  • , S. Hoback
  • , J. Hough
  • , C. Levesque
  • , I. MacLaren
  • , A. Markosyan
  • , I.W. Martin
  • , C.S. Menoni
  • , P.G. Murray
  • , S. Penn
  • , S. Reid
  • R. Robie, S. Rowan, F. Schiettekatte, R. Shink, A. Turner, G. Vajente, H.-P. Cheng, M.M. Fejer, A. Mehta, R. Bassiri
*Corresponding author for this work

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