Flexible high throughput deposition of optical coatings using closed field magnetron sputtering

D.R. Gibson; I. Brinkley; E.M. Waddell; J. Walls

doi:10.1364/oic.2007.ma4

Flexible high throughput deposition of optical coatings using closed field magnetron sputtering

D.R. Gibson, I. Brinkley, E.M. Waddell, J. Walls

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

“Closed field” magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings. CFM sputtering uses two or more different metal targets to deposit multilayers comprising dielectrics, metals and conductive oxides. optical properties.

Original language	English
Title of host publication	Optical Interference Coatings
Publisher	Optical Society of America
DOIs	https://doi.org/10.1364/oic.2007.ma4
Publication status	Published - 2007
Externally published	Yes

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10.1364/oic.2007.ma4

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title = "Flexible high throughput deposition of optical coatings using closed field magnetron sputtering",

abstract = "“Closed field” magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings. CFM sputtering uses two or more different metal targets to deposit multilayers comprising dielectrics, metals and conductive oxides. optical properties.",

author = "D.R. Gibson and I. Brinkley and E.M. Waddell and J. Walls",

year = "2007",

doi = "10.1364/oic.2007.ma4",

language = "English",

booktitle = "Optical Interference Coatings",

publisher = "Optical Society of America",

address = "United States",

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T1 - Flexible high throughput deposition of optical coatings using closed field magnetron sputtering

AU - Gibson, D.R.

AU - Brinkley, I.

AU - Waddell, E.M.

AU - Walls, J.

PY - 2007

Y1 - 2007

N2 - “Closed field” magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings. CFM sputtering uses two or more different metal targets to deposit multilayers comprising dielectrics, metals and conductive oxides. optical properties.

AB - “Closed field” magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings. CFM sputtering uses two or more different metal targets to deposit multilayers comprising dielectrics, metals and conductive oxides. optical properties.

U2 - 10.1364/oic.2007.ma4

DO - 10.1364/oic.2007.ma4

M3 - Conference contribution

BT - Optical Interference Coatings

PB - Optical Society of America

ER -

Flexible high throughput deposition of optical coatings using closed field magnetron sputtering

Abstract

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