Fast coatings for DWDM filters

Research output: Contribution to specialist publicationArticle

3 Citations (Scopus)

Abstract

The improvement in the speed and yield of precision electron-beam vacuum-deposited optical filters was discussed using optical feedback and plasma assisted technology. The plasma deposition source neutralizes plasma space charges near the substrate edge to counteract film thickness variations. Nonplasma neutralization from changes in plasma voltage could lead to a variation in assist deposition. Film thickness uniformity enhancement and flexibility in system setup was achieved by mounting electron beam guns on a separate plinth.
Original languageEnglish
Pages114-116
Number of pages3
Volume35
No.2
Specialist publicationPHOTONICS SPECTRA
Publication statusPublished - 2001

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