Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

Des Gibson; Shigeng Song; Lewis Fleming; Sam Ahmadzadeh; Hin On Chu; Stephen Sproules; Ryan Swindell; Xiaoling Zhang; Parnia Navabpour; Caspar  Clark; Mark Bailey

doi:10.1364/AO.378266

Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

Des Gibson, Shigeng Song^*, Lewis Fleming, Sam Ahmadzadeh, Hin On Chu, Stephen Sproules, Ryan Swindell, Xiaoling Zhang, Parnia Navabpour, Caspar Clark, Mark Bailey

^*Corresponding author for this work

School of Computing, Engineering and Physical Sciences

Research output: Contribution to journal › Article › peer-review

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Abstract

Optical properties of low-temperature pulsed DC-sputter deposited (≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.

Original language	English
Pages (from-to)	2731-2738
Number of pages	8
Journal	Applied Optics
Volume	59
Issue number	9
DOIs	https://doi.org/10.1364/AO.378266
Publication status	Published - 12 Mar 2020

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2020 02 03 Gibson et al Durable acceptedAccepted author manuscript, 1.6 MB

Desmond Gibson
- School of Computing, Engineering and Physical Sciences - Professor
Person: Academic

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@article{964401f27adf43869c80e50393f9db20,

title = "Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)",

abstract = "Optical properties of low-temperature pulsed DC-sputter deposited (≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.",

author = "Des Gibson and Shigeng Song and Lewis Fleming and Sam Ahmadzadeh and Chu, {Hin On} and Stephen Sproules and Ryan Swindell and Xiaoling Zhang and Parnia Navabpour and Caspar Clark and Mark Bailey",

year = "2020",

month = mar,

day = "12",

doi = "10.1364/AO.378266",

language = "English",

volume = "59",

pages = "2731--2738",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "9",

}

TY - JOUR

T1 - Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

AU - Gibson, Des

AU - Song, Shigeng

AU - Fleming, Lewis

AU - Ahmadzadeh, Sam

AU - Chu, Hin On

AU - Sproules, Stephen

AU - Swindell, Ryan

AU - Zhang, Xiaoling

AU - Navabpour, Parnia

AU - Clark, Caspar

AU - Bailey, Mark

PY - 2020/3/12

Y1 - 2020/3/12

N2 - Optical properties of low-temperature pulsed DC-sputter deposited (≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.

AB - Optical properties of low-temperature pulsed DC-sputter deposited (≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.

U2 - 10.1364/AO.378266

DO - 10.1364/AO.378266

M3 - Article

SN - 1559-128X

VL - 59

SP - 2731

EP - 2738

JO - Applied Optics

JF - Applied Optics

IS - 9

ER -

Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

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