Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

Des Gibson, Shigeng Song*, Lewis Fleming, Sam Ahmadzadeh, Hin On Chu, Stephen Sproules, Ryan Swindell, Xiaoling Zhang, Parnia Navabpour, Caspar Clark, Mark Bailey

*Corresponding author for this work

Research output: Contribution to journalArticle


Optical properties of low-temperature pulsed DC-sputter deposited (≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.
Original languageEnglish
Pages (from-to)2731-2738
Number of pages8
JournalApplied Optics
Issue number9
Publication statusPublished - 12 Mar 2020

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