CVD of high precision optical coatings

M.L. Hitchman; W. Manookian; S.H. Shamlian; D.R. Gibson

CVD of high precision optical coatings

M.L. Hitchman, W. Manookian, S.H. Shamlian, D.R. Gibson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.

Original language	English
Title of host publication	Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15)
Pages	1021-1028
Number of pages	8
Publication status	Published - 2005
Externally published	Yes
Event	15th European Conference on Chemical Vapor Deposition - Bochum, Germany Duration: 5 Sept 2005 → 9 Sept 2005

Conference

Conference	15th European Conference on Chemical Vapor Deposition
Abbreviated title	EUROCVD-15
Country/Territory	Germany
City	Bochum
Period	5/09/05 → 9/09/05

Cite this

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title = "CVD of high precision optical coatings",

abstract = "In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.",

author = "M.L. Hitchman and W. Manookian and S.H. Shamlian and D.R. Gibson",

year = "2005",

language = "English",

pages = "1021--1028",

booktitle = "Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15)",

note = "15th European Conference on Chemical Vapor Deposition, EUROCVD-15 ; Conference date: 05-09-2005 Through 09-09-2005",

}

TY - GEN

T1 - CVD of high precision optical coatings

AU - Hitchman, M.L.

AU - Manookian, W.

AU - Shamlian, S.H.

AU - Gibson, D.R.

PY - 2005

Y1 - 2005

N2 - In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.

AB - In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-31744438774&partnerID=MN8TOARS

M3 - Conference contribution

SP - 1021

EP - 1028

BT - Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15)

T2 - 15th European Conference on Chemical Vapor Deposition

Y2 - 5 September 2005 through 9 September 2005

ER -

CVD of high precision optical coatings

Abstract

Conference

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