CVD of high precision optical coatings

M.L. Hitchman, W. Manookian, S.H. Shamlian, D.R. Gibson

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.
Original languageEnglish
Title of host publicationFifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15)
Number of pages8
Publication statusPublished - 2005
Externally publishedYes
Event15th European Conference on Chemical Vapor Deposition - Bochum, Germany
Duration: 5 Sept 20059 Sept 2005


Conference15th European Conference on Chemical Vapor Deposition
Abbreviated titleEUROCVD-15


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