In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.
|Title of host publication||Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15)|
|Number of pages||8|
|Publication status||Published - 2005|
|Event||15th European Conference on Chemical Vapor Deposition - Bochum, Germany|
Duration: 5 Sep 2005 → 9 Sep 2005
|Conference||15th European Conference on Chemical Vapor Deposition|
|Period||5/09/05 → 9/09/05|