CVD of high precision optical coatings

M.L. Hitchman, W. Manookian, S.H. Shamlian, D.R. Gibson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.
Original languageEnglish
Title of host publicationFifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15)
Pages1021-1028
Number of pages8
Publication statusPublished - 2005
Externally publishedYes
Event15th European Conference on Chemical Vapor Deposition - Bochum, Germany
Duration: 5 Sep 20059 Sep 2005

Conference

Conference15th European Conference on Chemical Vapor Deposition
Abbreviated titleEUROCVD-15
Country/TerritoryGermany
CityBochum
Period5/09/059/09/05

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