@inproceedings{ee9f4bd5a25748618f16efbf64a462c5,
title = "Chemical vapour deposition of optical coatings onto small scale complex optical components",
abstract = "In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.",
author = "Hitchman, {M. L.} and Gibson, {D. R.} and W. Manookian and Waddell, {E. M.}",
year = "2005",
month = oct,
day = "5",
doi = "10.1117/12.625178",
language = "English",
series = "Proceedings of the Society of Photo-Optical Instrumentation Engineers",
publisher = "Society of Photo-Optical Instrumentation Engineers",
editor = "Claude Amra and Norbert Kaiser and Macleod, {H. Angus}",
booktitle = "Advances in Optical Thin Films II",
address = "United States",
}