@inproceedings{b15ac263ef584fa29dc22691a04602de,
title = "Chemical vapor deposition of high precision optical coatings",
abstract = "In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by chemical vapor deposition (CVD). We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering, and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.",
keywords = "low-pressure CVD, optical coatings, optical coating equipment, micro-optics",
author = "M.L. Hitchman and S.H. Shamlian and D.R. Gibson",
year = "2003",
month = oct,
day = "9",
language = "English",
series = "Conference Proceedings",
publisher = "Society of Vacuum Coaters",
pages = "383--386",
booktitle = "Society of Vacuum Coaters 46th Annual Conference Proceedings",
address = "United States",
}