Characterization and humidity sensing of ZnO/42° YX LiTaO 3 Love wave devices with ZnO nanorods

YJ Guo; J Zhang; C Zhao; JY Ma; HF Pang; PA Hu; F Placido; D Gibson; XT Zu; HY Zu

doi:10.1016/j.materresbull.2013.04.072

Characterization and humidity sensing of ZnO/42° YX LiTaO 3 Love wave devices with ZnO nanorods

YJ Guo
, J Zhang
, C Zhao
, JY Ma
, HF Pang
, PA Hu
, F Placido
, D Gibson
, XT Zu
, HY Zu

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

Original language	Undefined/Unknown
Pages (from-to)	5058-5063
Number of pages	6
Journal	Materials Research Bulletin
Volume	48
Issue number	12
DOIs	https://doi.org/10.1016/j.materresbull.2013.04.072
Publication status	Published - 2013

Keywords

Thin films
Nanostructures
X-ray diffraction
Electron mIcroscopy
Surface Properties

Access to Document

10.1016/j.materresbull.2013.04.072

Cite this

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title = "Characterization and humidity sensing of ZnO/42° YX LiTaO 3 Love wave devices with ZnO nanorods",

abstract = "Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.",

keywords = "Thin films, Nanostructures, X-ray diffraction, Electron mIcroscopy, Surface Properties",

author = "YJ Guo and J Zhang and C Zhao and JY Ma and HF Pang and PA Hu and F Placido and D Gibson and XT Zu and HY Zu",

year = "2013",

doi = "10.1016/j.materresbull.2013.04.072",

language = "Undefined/Unknown",

volume = "48",

pages = "5058--5063",

journal = "Materials Research Bulletin",

issn = "0025-5408",

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TY - JOUR

T1 - Characterization and humidity sensing of ZnO/42° YX LiTaO 3 Love wave devices with ZnO nanorods

AU - Guo, YJ

AU - Zhang, J

AU - Zhao, C

AU - Ma, JY

AU - Pang, HF

AU - Hu, PA

AU - Placido, F

AU - Gibson, D

AU - Zu, XT

AU - Zu, HY

PY - 2013

Y1 - 2013

N2 - Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

AB - Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

KW - Thin films

KW - Nanostructures

KW - X-ray diffraction

KW - Electron mIcroscopy

KW - Surface Properties

U2 - 10.1016/j.materresbull.2013.04.072

DO - 10.1016/j.materresbull.2013.04.072

M3 - Article

SN - 0025-5408

VL - 48

SP - 5058

EP - 5063

JO - Materials Research Bulletin

JF - Materials Research Bulletin

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ER -