Characteristics of sculptured Cu thin films and their optical properties as a function of deposition rate

H. Savaloni, F. Babaei, S. Song, F. Placido

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Sculptured copper thin films were deposited on glass substrates, using different deposition rates. The nano-structure and morphology of the films were obtained, using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). Their optical properties were measured by spectrophotometry in the spectral range of 340–850 nm. The real and imaginary refractive indices, film thickness and fraction of metal inclusion in the film structure were obtained from optical fitting of the spectrophotometer data.
Original languageEnglish
Pages (from-to)8041-8047
Number of pages7
JournalApplied Surface Science
Issue number18
Publication statusPublished - 30 Jun 2009
Externally publishedYes


  • Sculptured thin films
  • Bruggeman effective medium approximation
  • AFM
  • XRD
  • SEM

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