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Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

  • Sam Ahmadzadeh
  • , Des Gibson*
  • , Lewis Fleming
  • , David Hutson
  • , Greg McGann
  • , Shigeng Song
  • , Ameen Belke
  • , Allan James
  • , Stephen Wells
  • , Alan Forsyth
  • , Suzanne Bruckshaw
    • *Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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