@inproceedings{a194bf0082224ad4a0cf48b74fc9498d,
title = "Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance",
abstract = "Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220\%.",
author = "Sam Ahmadzadeh and Des Gibson and Lewis Fleming and David Hutson and Greg McGann and Shigeng Song and Ameen Belke and Allan James and Stephen Wells and Alan Forsyth and Suzanne Bruckshaw",
note = "Funding Information: This work was supported by InnovateUK as part of a Knowledge Transfer Partnership (KTP) project \#104736. Publisher Copyright: {\textcopyright} 2022 The Author(s); Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",
year = "2022",
doi = "10.1364/OIC.2022.MC.4",
language = "English",
series = "Technical Digest Papers",
publisher = "Optica Publishing Group (formerly OSA)",
editor = "R. Sargent and A. Sytchkova",
booktitle = "Optical Interference Coatings Conference (OIC) 2022",
address = "United States",
}