Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MEMS-based CMOS thermopile performance
- Sam Ahmadzadeh*
- , Des Gibson
- , Lewis Fleming
- , David Hutson
- , Shigeng Song
- , Allan James
- , Stephen Wells
- , Alan Forsyth
- , Suzanne Bruckshaw
*Corresponding author for this work
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